Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS
| By: | Wasa, Kiyotaka |
| Publisher: | Elsevier S & T |
| Print ISBN: | 9781437734836 |
| eText ISBN: | 9781437734843 |
| Edition: | 2 |
| Format: | Page Fidelity |
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