High Energy and High Dose Ion Implantation
| By: | Campisano, S.U.; Gyulai, J.; Kilner, J.A.; Hemment, P.L.F. |
| Publisher: | Elsevier S & T |
| Print ISBN: | 9780444894182 |
| eText ISBN: | 9780444596796 |
| Edition: | 1 |
| Format: | Page Fidelity |
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